Servicing and upgrading of existing vacuum systems, pumps, gauging, controllers and ancillary equipment. Specialists in upgrading Edwards E306 deposition systems with mini box

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Specialists in upgrading and retrofitting of Edwards E306 thin film vacuum deposition systems

Retrofit E306 - Chamber Options

To fit existing base plate Glass or stainless steel option, modular system direct Edwards replacement
 

BJ14 — a 360mm x 305mm borasilicate glass bell jar for direct replacement of the Edwards E306 vacuum Chamber. Wall thickness varies between 5mm and 7mm. The BJ14 uses a standard viton L seal. We recommend that the seal be replaced at the same time as the bell jar chamber. Custom lengths are also available.

 

GC360 - a 360mm x 305mm borasilicate glass cylinder for direct replacement of the Edwards E306 vacuum Chamber. Wall thickness varies between 5mm and 7mm. The GC360 is compatible with all Ceramisis top hat and top plate options and uses two standard viton L seals. We recommend that the seals are replaced at the same time as the chamber. Custom lengths are also available.

TP4P-SS- four port stainless steel top plate designed for use with a glass cylinder vacuum chamber. The plate has one central port and three outer ports at 120deg on the same PCD. Blind tapped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.

TP1P-SS- a single port stainless steel top plate designed for use with a glass cylinder vacuum chamber. The plate has one central port for sample transfer / rotation or positioning. Blind tapped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.


TH4P-SS- four port stainless steel top plate, designed for use with a glass cylinder vacuum chamber, it increases the height of the existing chamber by 100mm. The plate has one central port and three outer ports at 120 deg on the same PCD. Blind tapped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK­8MM sample rotation kit.

TH1P-SS- a single port stainless steel top plate, designed for use with a glass cylinder vacuum chamber, it increases the height of the existing chamber by 100mm. The plate has one central port. Blind tapped holes are installed to take the standard Edwards top plate lifting mechanism and the ARDK-8MM sample rotation kit.

MINIBOX- 400mm front loading stainless steel box chamber for users requiring space for full multi-technique deposition and / or large samples (up to 375mm)

MINIBOX - E306 retrofit

Sits on the existing base plate.
Front loading door.
Nominal 60 litre capacity.
All stainless construction.
Cost effective upgrade to a multi-technique box coater.
Large substrate capacity


The MINIBOX is a fully retrofittable vacuum chamber designed for the conversion of an existing Edwards E306 coating unit into a box deposition system.

Problems associated with cramped multi­technique bell jar and cylinder systems are overcome when the chamber is substituted for a MINIBOX. Because this retrofit has been designed as a multi-technique system from the start, it is able to adapt to configurations that many larger coating units find impossible to attain.

All the existing base ports are usable — the MINIBOX base mates to the E306 base plate via eight wall clamps, ensuring that the 0 ring seal is secure. On the box there are: three top plate ports designed for sample rotation / positioning, sample heating and sample bias; two side wall ports for fast action shutter, thin film head, optical access to the sample; a rear 150mm i/d additional pumping port for turbo or cryo pump retrofit front door view port

The MINIBOX can be configured for true multi- technique, multi-layer deposition processes making it ideal for small scale production and R&D prototyping. A fully loaded system would, for example, include the following techniques: a 4 pocket E-Beam source with water cooling, HT and rotation device; a 4 filament thermal source with high current feed throughs and discrete filament selection; a “flexihead” magnatron for sputtering, a thin film monitor / controller; a variable speed rotary sample plate; back side graphite sample heating (to 1000°C); plasma cleaning; box shielding; sample shutter.

With the maximum sample size a whopping 375mm old the MINIBOX competes with major OEM system designs but at a fraction of the price.

If the existing diffusion pump is to be retained as the primary pump, it is recommended that the backing / roughing pump be upgraded to approximately 30m3/ h. This gives a roughing time of circa 5 minutes from vent to the opening of the diffusion pump plate valve, and base pressures of circa 5 x 10e-7 mbar can be attained within 20 minutes from valve deployment.

Existing Edwards interlocks and controls remain functional after retrofit. Should the user so wish, Ceramisis can supply additional door / water interlocks / power modification kit for rotary pump upgrade.

For users that feel the retrofit is beyond their internal DIY capabilities, Ceramisis can offer a full refurbishment and upgrade service either in the field or from our fully fitted workshop in Plumley, Cheshire. Full clean room facilities (to Class 100) are available on site for those clients requiring the most stringent quality standards.

Bespoke modifications can be supplied (e.g. additional, inclined or enlarged ports) at additional cost.

Technical Specification

Material: all stainless steel 316
Finish: polished to mirror grade 8
External dimensions (mm): 400x400x400
Internal dimensions (mm): 380x388x388
Top plate ports: 301 NW35CF
Side wall ports: 2 of NW35CF
Rear wall port: 1 of NW15OCF
Front door port: I of NW63CF
Base port 306mm l/d 0 ring seated
Base seal: 7mm viton in dovetail groove
Door 12mm s/s with 0 ring seat
Door seal: 7mm viton in dovetail groove with
2 x thumb screw door retaining damps
Bakeable to 200°C
Leak tested to better than 2x 10e-8 mbar


TE-4 Thermal Evaporator

4 filament / boat source

Sequential or co-deposition

Low footprint size

Water cooled option for organics

Easy retrofit

The TE4 is a compact thermal (resistive) evaporator designed for easy retrofit to any existing vacuum coater.

The base plate is configured such that the user can alter the geometry of the TE4 on the fly, enabling change from 4 hearth sequential deposition to a 2 x 2 co-deposition unit during routine run loading.

The base plate is also pre-configured for retrofit water cooling which reduces radiated heat transferred from active to non active boats. This is vital where metal and organic deposition is undertaken.

Unlike other multi-boat designs, the TE4 does not need to rotate to connect to a power feed through. Each boat’s power contact is discrete , giving repeatable results for the said process at the same power setting.

For customers wishing to retrofit to an Edwards E306 type coater, the TE4C control unit replaces the old style variac / meter double bay unit and the 4 position filament switch single bay unit, and unbelievably fits into one single bay. Existing LT transformer(s) can be utilised, but if co-deposition is required, two of TE2C controllers replace the TE4C,additional LT transformer and E306 mains power pack ( up to 20A) are required.

Dependant upon the power required, there are a number of feed through options available. The standard option is for two of one inch bolt feed throughs which allows for 38A of power and co­deposition or sequential configuration
 

Control system:
There are a number of options available for power supply and control systems.

TE4C: 4 position filament / boat select switch, digital ammeter display (actual power through filament), on / off circuit breaker switch, rotary potentiometer power control. 3U x 14 panel rack space for console mounting (eg E306)

TE4C-PS: as above but with integrated 40A 7.5V power supply, all housed in a 2U x ¼ panel steel painted box for rack mounting.

TE2C: Ideal for those wishing to configure the TE4 to co-deposition. 2 position filament / boat select switch, digital ammeter display ( actual power through filament), on / off circuit breaker switch, rotary potentiometer power control. 3U x ¼ panel rack space for console mounting (eg E306)

Summary:

Sequential deposition: I x TE4, 1 x TE4C, 2 x feed throughs, 1 x transformer (psu), cable set.

Co-deposition: 1 x TE4. 2 x TE2C, 2 x feed throughs, 2 x transformers (psu), cable set.
 

Technical Specification:

Material: All UHV compatible stainless steel and oxygen free copper. Insulators are ceramic.

Mounting: Either by central stud pillar (M8) allowing for rapid source height adjustment, or by four through base mounted studs.

Capacity: up to four filaments / boats. Distance between centres on filament posts is **mm

Shielding: removable stainless steel sector shields with base plate shield holder projecting large area to water cooling plate.


Associated products


ARDK-8MM - Automated sample rotation kit -8 mm drive, variable speed motor, gearbox, controller, Sample plate

MRDK-8MM- Manual sample rotation / positioning kit -8 mm drive, Knob, Sample plate

MSSK-8MM- Manual sample shutter kit -8 mm drive, lever, height adjuster, Shutter plate

ME1O- mini e-beam evaporator for wire samples — evaporator head, linear drive, power supply and cable set

EBE4- a four hearth electron beam evaporator, magnetically focussed and water cooled crucible turret. Optional electromagnet assembly for beam sweep.

TORUS Magnatron source. Choice of 2” to 6” sputter source for DC and/or RF sputtering. Flexihead option for attitude adjustment
 

Servicing

Ceramisis can also cater for servicing of existing vacuum equipment, including pump repairs and refurbishment, and re-fillamenting of gauges.

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